ALERT

In observance of US Thanksgiving holiday, Agilent Cross Lab iLab Operations Software will be closed during US hours on Thursday November 23rd and Friday November 24th, 2017. EU and APAC support coverage will remain open during this time. We will resume US support hours on Monday November 27th, 2017. For urgent matters, please add "URGENT" to the ticket subject and these requests will be prioritized first.

nFab

Overview of Services

                                                                                            

 

Semiconductor fabrication clean room facility. Services include-

  • Plasma etching facilities that include plasma enhanced chemical etching and deep trench etching.
  • Wet etching and chemical processing bay for wet chemistry
  • Class 10 photolithography bay with manual and automatic wafer spin coating, mask alignment and development
  • Proflilometry bay including 3d imaging, film stress,thiickness measurement and probing stations.
  • 7 tube processing furnace for wet/dry oxide, boron or phosphorus doping, poly silicon, annealing, and LTO.
  • Metallization Bay includes e-beam and  RF -DC sputtering systems.
  • Sputtering targets include  Ti, Al, ZnO, Ni, Co, Nb, Si, Mo, Chrome, TiO2, Fe, SS, ITO, Al 1% Si, Ta, Si3N4, SiO, ZrO2. All are 8" diameter for unifomity over 6" wafers.
  • ebeam capabilities include single and dual evaporation systems.
  • ebeam sourses include Au, Pt, Ti, Cr,Cu, Al, Fe, Si, C, Mo
  • PECVD deposition system for silicon oxide, nitrides, and oxynitrides.


Gaining Access

 

  1.  Submit a Usage Proposal form to Core  Manager for verification of capabilities: Usage Proposal Form
  2.  Submit an Account form to the Account Manager: Account Form
  3.  Contact Account Manager for billing detail and to establish a user account
  4.  Schedule Laboratory Safety  Training: Environmental Health & Safety Training
  5.  Provide certificate of completion of training to the Core staff
  6. Schedule Laboratory Orientation and receive training
  7.  Read the nFab Safety Training Manual: Safety Training Manual
  8.  Take and pass the  Safety Quiz
  9.  Sign the Release of Liability form and submit to Core Manager: Release of Liability
  10. Obtain ilab Username and Password
  11. Schedule equipment training. Must show competence before receiving access rights to nFab tools: Tool Request Form
  12. Schedule equipment use on ilab

 

Note:   In some cases the exact order is modified to fit schedules

 

Wayne State Users
All users that are not internal to Wayne State:

 

 

Leadership

 

Dr. Mark Cheng - Director

 

Dan Durisin - Clean Room Operations Manager

Bill Funk - Clean Room Manager

Chemika Buffington-Manager, WSU Core Facilities

 


Location and hours of operation

 

Hours Location

8:00 AM to 6:00 PM     

Monday to Friday      

3rd Floor Engineering Building

Wayne State University

5050 Anthony Wayne Dr.

Detroit, MI 48202


Links and Resources

  1. DCaTS Website
  2. nFab Video:http://vimeo.com/30562603